发明名称 FILM TRANSISTOR ARRAY SUBSTRATE AND METHOD FOR FABRICATING SAME
摘要 A film transistor array substrate and a method for fabricating same. The film transistor array substrate comprises: a substrate (1) and a film transistor and a storage capacitor that are formed on the substrate (1). The storage capacitor comprises a first electrode plate (31) located on the substrate (1), a gate insulating layer (3) or an etch stop layer (5) located on the first electrode plate (31), and a second electrode plate (32) located on the gate insulating layer (3) or the etch stop layer (5). Only one insulating layer, that is, the gate insulating layer (3) or the etch stop layer (5), exists between the two electrode plates of the storage capacitor. An insulating layer of a storage capacitor has a relatively small thickness, a capacitor area is relatively small, and an aperture ratio is relatively large.
申请公布号 WO2016173012(A1) 申请公布日期 2016.11.03
申请号 WO2015CN79421 申请日期 2015.05.21
申请人 SHENZHEN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD. 发明人 LV, Xiaowen
分类号 H01L51/52;H01L21/77;H01L27/12;H01L51/56 主分类号 H01L51/52
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