| 摘要 |
PURPOSE:To exclude stagnation of cleaning fluid at the corner parts of a cleaning tank, and to prevent a cleaning material from readhesion of foreign matters of dust, etc. remaining at the stagnation parts by a method wherein bubbling gas ejection parts are provided at the corner parts. CONSTITUTION:A bubbler 3 is consisting of a base pipe part 4 protruding a little in the upper direction penetrating the central part of the base wall face of a cleaning tank 1, and a main bubbling gas ejection part 5 extending in the longer direction of the cleaning tank 1 forming parallel lines of two lines branching from the top edge part of the base pipe part thereof, and having upward gas ejection holes 6 of the plural number of pieces, etc. A cleaning material is put in cleaning fluid fed in the tank 1 from a supply pipe 2, and overflowing from the top part. At this time, bubbling gas 6a is ejected upwards at the central part in the tank 1, and stagnation checking bubbling gas 8a is ejected upwards at the respective corner parts of the tank 1 from the stagnation checking gas ejection holes 8 of the respective tip parts of stagnation checking bubbling gas ejection parts 7 of four pieces. |
