LASER TREATING METHOD AND DEVICE

摘要

PURPOSE:To provide laser treating technique capable of performing suitable treatment in response to all conditions by altering and regulating the intensity of energy of a laser in response to a laser emitting area. CONSTITUTION:An aperture 6 is formed through a mirror 5 at the emitting side of a zoom lens 3 mounted before the emission of a laser generator 2 and composed of an actuator 7 to alter and regulate the opening area of the aperture. An objective lens 8 is mounted at the emitting side of the aperture 6, a laser beam controlled in diameter by the aperture 6 focuses an emitting image in the prescribed area on a photomask 9 of an object to be treated and placed on an X-Y table 10. A detector 14 for detecting the opening area or degree is connected to the aperture 6 to generate a control signal corresponding to the intensity (level) of the laser energy in response to the detected value and connected with a controller 15 for applying it to a zoom ratio regulaor 4. Accordingly, the intensity of the laser energy can be automatically altered and regulated in response to the laser emitting area.