| 摘要 |
<p>: The invention relates to a radiation-sensitive composition comprising a polymer and an iodine-containing azide compound, at least a part of which can be fixed substantially in the polymer by exposure to a radiation, or a radiation-sensitive composition comprising a polymer, an azide compound, and an iodine compound, at least a part of which can be fixed substantially in the polymer by exposure to a radiation. This composition can be subjected to dry development with oxygen plasma after the exposure to radiation followed by heating.</p> |
