| 摘要 |
PURPOSE:To measure the radius of curvature of a circular curve surface in short time by irradiating an electromagnetic wave toward said surface, making the reflected light incident to an incident device in the position where the reflected light is roughly equal to the radiation position, correcting both radiation position and incident position to the position where the detection level is max. and detecting the linear distance between the corrected position and the circular curve surface. CONSTITUTION:An electromagnetic wave is radiated from an electromagnetic wave radiating part 16 toward the circular curve surface of an object 28 to be measured. The reflected wave of the electromagnetic wave in the position roughly equal to the radiation position of the electromagnetic wave is made incident to an electromagntic wave incident device 30, by which the level thereof is detected. If the radiation position of the electromagnetic wave and the incident position of the reflected wave are both corrected to the position where the detection level of the reflected wave is max., the corrected position is the focus to the circular curve surface of the object 28. The radius of curvature of the circular curve surface of the object 28 is determined by detecting the linear distance between the corrected position and the circular curve surface of the object 28. the linear distance between the part 16 and the circular curve surface of the object 28 is detected by a displacement detecting part 20 in order to detect the linear distance. The detected signal is supplied via a storage part 22 to an arithmetic part 24 which displays the calculated value as the radius of curvature of the circular curve surface of the object 28 on a display part 26. |
