| 摘要 |
PURPOSE:To manufacture a good-quality single crystal with a convenient and inexpensive equipment by constituting a titled apparatus wherein a single crystal is pulled up after a DC magnetic field is impressed to a molten body surrounded circumferentially by a Helmholtz coil wherein two circular coils are arranged oppositely. CONSTITUTION:A Helmholtz coil, obtained by arranging oppositely two circular solenoid coils 15 and 16 contained respectively in crystals 17 and 18 surrounding circumferentially a molten body 3, is provided to the outside of a heater 2 in a single crystal manufacturing apparatus of the Czochralski method wherein after a seed crystal 4 is dipped in and then pulled up from the molten body 3 obtained by heating a starting material in a crucible 1 with a heater 2 surrounding concentrically the crucible 1, a single crystal 5 is grown in company with the seed crystal 4. A magnetic field is generated by using the Helmholtz coil as a superconducting magnet, and a DC magnetic field 14, which is symmetrical to a crystal-growth axis 7 and has a uniform distribution of magnetic field along the crystal-growth surface, is impressed to the molten body 3. The heat convection in the molten body 3 is restrained in this way, and the high-quality single crystal 5 can be obtained. |
