| 摘要 |
PURPOSE:To enable a beam current to be homogeneously applied to a workpiece by making the shape of the protruding hole of the filament of the grid of an electron gun similar to the cross sectional shape of a lotus rhizome. CONSTITUTION:The energy distribution of a beam is equalized by causing the beam discharge hole to have a shape similar to the cross sectional shape of a lotus rhizome. The size of each space area of the lotus-rhizome-like cross section can be variously changed according to the shape of the filament and the required energy distribution. As a result, a thermal area with a required energy density distribution (such as a homogeneous diffusion of energy) can be produced on the sample surface thereby enabling a good thermal treatment such as hardening, tempering or annealing to be performed. |
