| 摘要 |
PURPOSE:To greatly enhance adhesion of a resist to a substrate by using a polymer having an atomic group specified in structure in the molecule. CONSTITUTION:Adhesion between a resist and a substrate is improved by using as an effective component a polymer having an atomic group represented by formula ( I ) in which R<1> and R<2> are each H or a substituent, (m) and (n) are each an integer of 1-5, and X is OH or mercapto. Said polymer having said atomic group of formula ( I ) has a mol.wt. of, preferably, 2,000-100,000, especially, 5,000-50,000. This produced polymer is reprecipitated and subjected to water washing, etc. to remove a polymn. catalyst residues, an emulsifier, etc., and dissolved in methyl isobutyl ketone or the like to obtain an agent for improving adhesion between the resist and the substrate. |
