SCANNING ELECTRON MICROSCOPE

摘要

PURPOSE:To obtain image display of high resolution by converging primary electron rays the direction of the spin of which is periodically reversed on the sample surface, scanning the electron rays in a frequency sufficiently lower than that of the spin inversion and subjecting the thus obtained scattered electron rays to synchronous detection in the frequency of the spin inversion. CONSTITUTION:An oscillator 7 is connected to a primary electron ray generator 1 so as to reverse the direction of the spin of primary electron rays 3 in a frequency sufficiently higher than the scanning frequency without changing the intensity of the primary electron rays 3. The electron rays 3 are accelerated by an accelerating lens 2 before being converged by a convergent lens 4 upon a sample surface 6. The electron rays 3 are scanned over the sample surface 6 by means of a deflecting electrode group 5 and scattered electron rays 11 are detected by a detector 10. An output signal from the detector 10 is subjected to synchronous detection by means of a lock-in amplifier 8 and its output is displayed as a luminous signal image on a displayer 9. By the means mentioned above, it is possible to perform image display of high resolution.