| 摘要 |
PURPOSE:To obtain a pressure sensor having high sensitivity by providing a fixed plate having a slit hole, a movable plate which is placed so as to be opposed to said plate and to which a pressure to be measured is applied, and a supporting part for supporting the movable part by two points on a straight line passing through the center of gravity so that this movable plate can rotate. CONSTITUTION:A pressure detecting part 3 is constituted of a fixed plate 4 fixed to partition walls 21, 22, and a movable part 6 placed opposingly at a small interval (d) to the fixed plane 4 through a spacer 5. Plural slits for leading a pressure of a chamber 1b are provided on the fixed plate 4, also the movable part 6 consists of a frame 61, and a movable plate 62 which is supported through a supporting part 63 and installed so as to be opposed to the fixed plate 4, and on the movable plate 62, plural slits 64 are provided on a position where they are not opposed to plural slits 41 of the fixed plate 4.
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