发明名称 METHOD FOR THE DEPOSITION OF FILMS OF MIXED OXIDES ON COMPOSITE MATERIAL SUBSTRATES
摘要 In a method for the deposition of a film of mixed oxide on a composite material substrate, a step of evaporation-deposition of the mixed oxide, carried out with the aid of an electron beam sent to a target of mixed oxide having the same stoichiometric composition as the film to deposit, is carried out at an increasing deposition rate, measured on the substrate; in particular, the evaporation-deposition step comprises at least one first step of growth carried out at a deposition rate lower than or equal to a predetermined threshold, and at least one second step of growth carried out at a deposition rate higher than the threshold.
申请公布号 WO2016151357(A1) 申请公布日期 2016.09.29
申请号 WO2015IB52061 申请日期 2015.03.20
申请人 EDISON S.P.A. 发明人 BINDI, Massimiliano
分类号 C23C14/08;C23C14/30;C23C14/54;C23C14/58;H01M4/86;H01M4/88;H01M4/90;H01M8/12 主分类号 C23C14/08
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