发明名称 SETT ATT TRANSPORTERA ALSTER VID EN TILLVERKNINGS- OCH/ELLER EFTERBEHANDLINGSPROCESS
摘要 Method for transporting disc-shaped, circular or essentially circular products from a manufacturing process to and through another process comprising at least one process stage which is executed in to all intents and purposes dust-free conditions under vacuum. The invention is characterized in that the products (37) from the first-mentioned process are placed in a magazine (2; 3; 4) with a to all intents and purposes dust-free atmosphere. Once a pre-determined number of products (37) has been received, the magazine (2; 3; 4) is sealed, evacuated and transported to vacuum process equipment (1) in which the aforementioned process stage is executed. The magazine (2) is connected to the latter and is opened under vacuum, whereupon the products (37) are removed from the magazine (2), one by one, and are conveyed inside the equipment (1) via a process zone (16) into a second, originally empty magazine (3) connected to the equipment. Once the pre-determined number of products (37) has been received, the second magazine is closed, with the vacuum maintained, and is disconnected from the vacuum process equipment (1).
申请公布号 SE8600228(D0) 申请公布日期 1986.01.20
申请号 SE19860000228 申请日期 1986.01.20
申请人 APPLIED VACUUM SCANDINAVIA AB 发明人 J * NORDLANDER
分类号 B65G49/00;B65G49/07;C23C14/56;H01L21/677 主分类号 B65G49/00
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