| 摘要 |
PURPOSE:To cope with a mobile means of every characteristic by writing a moving amount of a storage element in advance, giving a mobile data using an output obtained from a detector as an address so as to position a semiconductor wafer, etc., thereby varying easily the mobile amount. CONSTITUTION:The moving amount to an output of a detector 1 is stored in memories 19, 20. When an output of an A/D converter 3 is ''00000101'', an output (distance from an object position) of the memory 19, is e.g., ''00001010'', this value is an address to the memory 20 and the output (moving amount) therefrom is ''11101000''. Since the moving direction is decided negative when the MSB is set to ''1'' and positive when not, the state is divided by tri-state buffers 7, 8, the result is given to a driver 9 or 10 to drive the motor 11. If a permissible value C is not satisfied, a signal from a comparator 12 and a moving end signal A are ANDed, a conversion signal is given to the A/D converter 3 and the operation as above is repeated until the permissible value C is satisfied. |
