| 摘要 |
PROBLEM TO BE SOLVED: To provide an X-ray optical system for constructing an AKB mirror optical system consisting of four total reflection X-ray mirrors in order to constitute an image formation type X-ray microscope and an X-ray measurement device by reducing or expanding X-rays without aberration with high resolution.SOLUTION: An X-ray optical system includes: a mirror manipulator 10 in which a horizontal stage 11 and a vertical stage 12 are arranged in an optical axis direction L of X-rays, the horizontal stage is provided with a horizontal elliptic mirror M1 and a horizontal hyperbolic mirror M3 to be finely adjustable, the vertical stage is provided with a vertical elliptic mirror M2 and a vertical hyperbolic mirror M4 to be finely adjustable, front and rear position relation between the horizontal elliptic mirror and the horizontal hyperbolic mirror and front and rear position relation between the vertical elliptic mirror and the vertical hyperbolic mirror in the optical axis direction are set to the same; and alignment monitoring means 20 for giving a standard for finely adjusting a horizontal posture of the horizontal elliptic mirror and the horizontal hyperbolic mirror and a vertical posture of the vertical elliptic mirror and the vertical hyperbolic mirror so as to be ideal postures off line. |
