| 摘要 |
PURPOSE:To obtain a source for vacuum deposition causing no electric discharge during heating with electron beams by adding a specified amount of carbon fibers to a nitride, an oxide or a mixture thereof as a main component. CONSTITUTION:This source for vacuum deposition contains 0.01-5wt% carbon fibers besides a nitride such as Si3N4, an oxide such as In2O3, Y2O3 or TiO2, or a mixture thereof as a main component and it is formed by pressing at ordinary temp. The carbon fibers have 0.1-1mum diameter and 5-30mm. length. |
