SEMICONDUCTOR VAPOR PHASE GROWING APPARATUS

摘要

The appts. comprises a furnace and control appts. There is a thermocoupler for the wafer and a heat controller. The control appts. comprises a memory device and an operating system. The memory device stores standard temps. and the sequences for the heat controller. Temp. is controlled linearly to the aimed temp. during the temp. increasing or temp. decreasing sequence. The process reduces time and thermal shock to the wafer.