| 摘要 |
Provided is an actuator including: first to third rotation axes provided at a fixed section and having axes in a same direction, first to third rotation sections provided at positions offset from centers of the corresponding rotation axes, and rotating in response to the corresponding rotation axes; a movable section including first and third side walls facing the first and the third rotation sections in a first direction on a movable plane, and a second side wall facing the second rotation section in a second direction, the movable section moving on a predetermined movable plane in response to rotation of the first to third rotation sections; and a biasing section biasing the movable section with respect to the fixed section in at least one of the first direction and the second direction, and making at least one of the first to third rotation sections abut against the corresponding side wall. |
| 主权项 |
1. An actuator for adjusting a position of a device under test, comprising:
a fixed section; first, second, and third rotation axes provided at the fixed section and having axes in a same direction; first, second, and third rotation sections provided in correspondence to the first, second, and third rotation axes, provided at positions offset from centers of the corresponding rotation axes, and rotating in response to rotation of the corresponding rotation axes; a movable section including first and third side walls facing the first and the third rotation sections in a first direction on a predetermined movable plane, and a second side wall facing the second rotation section in a second direction different from the first direction, the movable section moving on the movable plane with respect to the fixed section in response to rotation of the first, second, and third rotation sections, and adjusting a position of the device under test; and a biasing section biasing the movable section with respect to the fixed section in at least one of the first direction and the second direction, and making at least one of the first, second, and third rotation sections abut against the corresponding side wall. |
