METHOD FOR MANUFACTURING SINGLE CRYSTAL

摘要

Method for manufacturing a single crystal according to a CZ method, including: pre-examining a correlation between an Al/Li ratio in a quartz raw material powder used for producing the quartz crucible, a use time of the crucible, a devitrification ratio at the use time, and occurrence or nonoccurrence of melt leakage attributable to the devitrification part; setting a range of the devitrification ratio of the quartz crucible in order not to generate the melt leakage, and determining a maximum use time of the quartz crucible according to the Al/Li ratio so as to fall within the set range of the ratio, on the basis of the correlation; and growing the single crystal by using the quartz crucible in the range of the maximum use time. This provides a manufacturing method which can efficiently use a quartz crucible to grow a single crystal while preventing occurrence of melt leakage.

主权项

1. A method for manufacturing a single crystal from a raw melt contained in a quartz crucible located in a furnace of a single crystal manufacturing apparatus according to a Czochralski method, comprising:
examining a correlation between a concentration ratio of Al to Li contained in a quartz raw material powder used for producing the quartz crucible, a use time of the quartz crucible, a ratio of a thickness of a devitrification part to a thickness of the quartz crucible at the use time, and occurrence or nonoccurrence of melt leakage attributable to the devitrification part, in advance; setting a range of the ratio of the thickness of the devitrification part to the thickness of the quartz crucible to be used in growing the single crystal in order not to generate the melt leakage attributable to the devitrification part, and determining a maximum use time of the quartz crucible according to the concentration ratio of Al to Li contained in the quartz raw material powder used for producing the quartz crucible to be used so as to fall within the set range of the ratio, on the basis of the correlation; and growing the single crystal by using the quartz crucible in the range of the maximum use time.