| 摘要 |
PURPOSE:To short a measuring time as a whole, by reading stored data calculated with low time resolving power and binarizing the same to detect the change time of voltage. CONSTITUTION:The electron beam in a stroscopic electron beam apparatus 1 is allowed to irradiate IC14 on an XY stage through a pulse gate 11 and the quantity of the secondary electron from IC14 is detected by an analyser 13 and converted by an A/D converter 3 and added by an addition averaging processing circuit 9 while the average value of secondary electron output at analysis voltage V1 is stored in memory M1 through a switch SW and the average value of secondary electron output at analysis voltage V2 is stored in memory M2 through said switch W. The stored data are operated with respect to the ratio thereof by a ratio operation circuit 15 and collimated with the table in a radio table circuit 16 by a collimation circuit 17 to calculate the voltage of the wiring of IC14 while said voltage is stored in memory 18 and subsequently read to be inputted to a time magnifying detection system 19. In the detection system, measured data calculated with low time resolving power is differentiated and binarized to perform the detection of a time magnifying region and not only rising start time and period but also falling start time and period, both of which show the abrupt change in voltage, are calculated to be sent to a control circuit 6 and accurate measurement is enabled.
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