| 摘要 |
PROBLEM TO BE SOLVED: To provide a vibration piece capable of reducing the equivalent series resistance.SOLUTION: A vibration piece 100 includes a crystal substrate 10 having a first convex portion 16, and a second convex portion 18 provided to overlap the first convex portion 16 in the plan view, a first excitation electrode 20a provided on the surface of the first convex portion 16, and a second excitation electrode 20b provided on the surface of the second convex portion 18. The center C1 of the first convex portion 16 is deviated from the center C of the crystal substrate 10 in one direction of the Z' axis, and the center C2 of the second convex portion 18 is deviated in the other direction of the Z' axis. A first mass body 30 is provided on the second surface 10b so as to overlap a first region 17 of the first convex portion 16 where the first excitation electrode 20a on one direction side is not provided, in the plan view, and a second mass body 32 is provided on the first surface 10a so as to overlap a second region 19 of the second convex portion 18 where the second excitation electrode 20b on the other direction side is not provided, in the plan view.SELECTED DRAWING: Figure 3 |
