| 摘要 |
PROBLEM TO BE SOLVED: To hold between a base to which a vibrator is fixed and a vibrator support member in a manner to have flexibility in the pressurization direction without backlash in the moving direction, and to dispose pressurization means for applying pressure to the vibrator inside a connection member.SOLUTION: An ultrasonic motor includes: a vibrator which performs ultrasonic vibration by an applied high frequency drive voltage; a slide member which frictionally contacts to the vibrator; pressurization means for applying pressure on the vibrator relative to the slide member; a base to which the vibrator is fixed; a vibrator support member which holds the base; and connection means for connecting the vibrator to the vibrator support member. The vibrator and the slide member relatively move by ultrasonic vibration. The connection means includes: the base; a rolling member which freely moves the base relative to the vibration support member in the pressure direction of the pressurization means; and an energization member which energizes the rolling member in a direction perpendicular to the pressurization direction of the pressurization means.SELECTED DRAWING: Figure 1 |
