发明名称 METHOD OF CUTTING LARGE NUMBER OF SLICES OF ESPECIALLY UNIFORM THICKNESS FROM WORK PIECE SIMULTANEOUSLY
摘要 PROBLEM TO BE SOLVED: To cut a large number of slices simultaneously from a cylindrical workpiece by means of a wire-saw, strictly along a convex cut surface, under existence of liquid cutting means.SOLUTION: In a method where a wire 1 extends across a wire grid consisting of a large number of wire portions arranged in the parallel direction between rotatable guide rollers 3, 4, a wire portion having tension in the longitudinal direction exhibits relative motion continuously and alternatively for a workpiece between the first direction of rotation and the second opposite direction, as a result of rotation of the guide roller, the wire is moved by a first length during rotation in the first direction and by a second length during rotation in the second direction (the second length is less than the first length), the wire tension part in the longitudinal direction at a moment in time of cutting with a first cutting depth is larger than that at a second moment in time involving a second cutting depth, and the second moment in time is a moment in time when the engagement length l of the wire part in the workpiece after moment in time of cutting is larger than 0.SELECTED DRAWING: Figure 1
申请公布号 JP2016174173(A) 申请公布日期 2016.09.29
申请号 JP20160097823 申请日期 2016.05.16
申请人 SILTRONIC AG 发明人 GEORG PIETSCH
分类号 H01L21/304;B24B27/06;B28D5/04 主分类号 H01L21/304
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