METHOD OF MANUFACTURING PIEZOELECTRIC ELEMENT, PIEZOELECTRIC ELEMENT, PIEZOELECTRIC DRIVE DEVICE, ROBOT, AND PUMP

摘要

PROBLEM TO BE SOLVED: To provide a method of manufacturing a piezoelectric element capable of suppressing peel-off of an insulating layer.SOLUTION: A method of manufacturing a piezoelectric element includes the steps of: forming a first electrode layer (S102); forming a piezoelectric body layer above the first electrode layer (S104); forming a second electrode layer above the piezoelectric body layer (S106); patterning the second electrode layer (S110); patterning the piezoelectric body layer by wet-etching (S112); and forming an organic insulating layer on a lateral face of the patterned piezoelectric body layer (S116).SELECTED DRAWING: Figure 2