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发明名称
VERFAHREN ZUR GRUPPENWEISEN MONTAGE VON KERAMIKHALBSCHALEN AUF TRAEGERSTREIFEN
摘要
申请公布号
DD238287(A1)
申请公布日期
1986.08.13
申请号
DD19850277290
申请日期
1985.06.12
申请人
VEB ZFT MIKROELEKTRONIK,,,,DD
发明人
RENNECKE,MANFRED,DD;BIRNBAUM,JOERG-PETER,DD;KUNZ,HORST,DD
分类号
H01L21/48;H01L21/68;(IPC1-7):H01L21/68;H01L21/96
主分类号
H01L21/48
代理机构
代理人
主权项
地址
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