SEMICONDUCTOR EVALUATION DEVICE AND SEMICONDUCTOR EVALUATION METHOD

摘要

PURPOSE:To improve spatial resolution of emitting cathode luminescence by providing a goniometer to a sample holder to precisely set the incident angle of the irradiating electron rays. CONSTITUTION:Cathode luminescence 4 is emitted from the crystal surface of a semiconductor sample 2 by the irradiation of the incident electron rays in a bundle 1 in vacuum, wherein the goniometer 3 is attached by the sample holder. The luminescence is received and processed by a condensing mirror 5 by a cathode luminescence spectroscope 6 to carry out evaluation on crystal defects or non-uniform distribution of the impurities in the additives. In such a case, the spatial resolution, especially, in the direction of depth of the cathode luminescence emitted at the incident angle of the bundle 1 being precisely set to the desired value by the device 3 to permit high precision evaluation.