| 摘要 |
PURPOSE:To set efficiently a movement locus for moving a detecting element by providing a detecting element movement procedure storage process for storing the movement track of the detecting element, a measurement data fetch process, and a measured value arithmetic process. CONSTITUTION:While the detector 17 is moved through a moving mechanism 19 along a body 11 to be measured on a mount table 12 according to a measurement procedure consisting plural steps, the output signal of a displacement detector is inputted to the robot operation commanding device 3 of a robot mechanism 4 independent of a measuring instrument body 2 to store the movement trace of the detecting element 17. Then, the mechanism 4 is coupled with the moving mechanism 19 or detecting element 17 and then put in operation according to movement locus data stored in the commanding device 3 in every step of the measurement procedure, and while the detecting element 17 is put in charge of the body 11 to be measured, the output signal of the displacement detector is inputted to a data processor 5. Then, the size, etc., of the object body 11 are calculated on the basis of the input data and a next step start command is sent to the commanding device 3 after the arithmetic. Thus, all steps of the measurement procedure program are repeated to take a measurement automatically.
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