| 摘要 |
PURPOSE:To decide simply the quality of a transfer gate which handles a fine signal charge by providing a photodiode for inspection connected to respective input terminal columns of the transfer gate on an integrating circuit for driving an optical sensor. CONSTITUTION:An a-Si photoelectric converting element 2 arranged together with plural semiconductor substrates 10 onto an insulating substrate 1 is connected to an input terminal column 11 by a bonding wire 3 at the ratio of 1:1. A photoelectric converting element composed of a p-n junction photodiode 12 arranged on a semiconductor substrate 10 is also connected at the ratio of 1:1. A transfer gate column 13 connected to the input terminal column 11 sends in a time series the signal charge generated at the a-Si photoelectric converting element 2 or the p-n junction photodiode 12 successively to a floating gate amplifier 17 and this is read from a signal output terminal 18. Thus, the rays of light are made incident on the p-n junction photodiode part and by observing the signal output, the quality of the characteristic as an integrating circuit single body for driving can be decided.
|
