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发明名称
SELF-ALIGNED METAL-SEMICONDUCTOR FIELD EFFECT TRANSISTOR
摘要
申请公布号
EP0175864(A3)
申请公布日期
1986.12.03
申请号
EP19850108697
申请日期
1985.07.12
申请人
INTERNATIONAL BUSINESS MACHINES CORPORATION
发明人
CODELLA, CHRISTOPHER FRANK;OGURA, SEIKI
分类号
H01L21/265;H01L21/338;H01L29/08;H01L29/10;H01L29/812;(IPC1-7):H01L29/08;H01L29/80
主分类号
H01L21/265
代理机构
代理人
主权项
地址
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