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发明名称
FINE PATTERN FORMING METHOD
摘要
申请公布号
JPS6247128(A)
申请公布日期
1987.02.28
申请号
JP19850187135
申请日期
1985.08.26
申请人
MITSUBISHI ELECTRIC CORP
发明人
MATSUDA SHUICHI;OKUMURA YOSHIKI;YASUE TAKAO
分类号
H01L21/027;H01L21/30
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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