VERFAHREN ZUM FESTSTELLEN VON REFERENZDATEN ZUM ZWECKE DER KORREKTUR VON MECHANISCHEN BEWEGUNGEN BEIM SCHREIBEN VON LINIEN MIT EINEM SCHREIBLASERSTRAHL IN EINEM METALLISIERTEN RASTER UND VORRICHTUNG ZUR DURCHFUEHRUNG DES VERFAHRENS.

摘要

1. A method of determining references for the correction of mechanical movements when inscribing lines in a metallised grid (15) on a non-metallic workpiece by means of an inscribing laser beam (3), characterised in that the non-metallic workpiece (1), e.g. a silicon disc, provided with the metallised grid (15) is simultaneously scanned during the linear operational movements with a scanning laser beam (4), that the reflected scanning laser beam (4) is received in a beam detector (12) and then evaluated, the metallised grid forming the reference structure and the evaluated signals being used to correct the relative movement between the workpiece (1) and the inscribing laser beam (3).