| 摘要 |
PURPOSE:To obtain the stable oscillation of transversal mode up to the higher region of photo-output, by forming a recessed part on one side or both sides of the light emitting surface of a semiconductor laser chip, and providing a miniature cavity only in the deepest guide of the recessed part. CONSTITUTION:A miniature cavity surface 3 formed in a recessed part by etching is arranged only in the part corresponding to a guide part so as to be parallel with the other cavity surface, the only part of which constitutes a Fabry-Perot resonator. The parts other than a guide part 2 on the side constituting a cavity surface by etching are not parallel with the cavity surface on the opposite side, on account of a formed recessed part 4. Accordingly, the Fabry-Perot mode does not exist for any other light distribution than in the guide part, which gives large loss. That is, loss is small for a fundamental mode 5, but large for a higher mode 6. At the time of high light output operation by large current injection, the fundamental mode oscillation stably occurs in the transverse mode.
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