| 摘要 |
PURPOSE:To facilitate highly accurate alignment by employing a light polarized linearly in the direction parallel to be longitudinal direction of slits of LFZP as an irradiating light. CONSTITUTION:A polarization means 10, by which a laser beam which is emitted by a laser 1 and consists of various polarized light components such as circularly polarized lights and linearly polarized lights is polarized linearly to a predetermined direction, is provided. The predetermined direction means the direction with which the direction of the linearly polarized light of the laser beam coincides with the longitudinal direction of slits 8 of a mask 7 when the laser beam enters the slit 8. As the laser beam which is linearly polarized like this can pass through a very thin slit, the convergency of the focus of the laser beam can be sharper. Therefore, the sharper the convergency of the focus, the easier more accurate alignment. |
