| 摘要 |
PURPOSE:To prevent colors from becoming irregular in a color solid-state image pickup element by forming a separation unit for separating a periphery from a photosensing portion before the step of forming a color filter, increasing the height of the region highest, and then forming a color filter, thereby uniformizing the thickness of the color filter on the photosensing portion. CONSTITUTION:A reading resistor and an output circuit are formed on a substance layer 8 under a separation unit 11. Here, the unit 11 is so selected in height as to be highest from the main surface of a semiconductor substrate 7 before the step of forming a color filter. When a solid image pickup element having the unit 11 is rotatably coated with a transparent resist 9 in this manner, the thickness T of the resist 9 on a photosensing portion 1 becomes substantially constant over the entire surface in response to the height H2 of the unit 11 irrespective of the presence of output patterns 41-43 after coating. Accordingly, the thickness of the film on the photosensing portion 1 of the resist 9 can be substantially constant to realize an image having no color irregularity.
|
