| 摘要 |
PURPOSE:To dispense with calibration by an interferometer, by mounting a reflecting mirror at a position on the opposite side of a probe and arranging both of them on the same straight line as the optical axis of an objective lens to fix the reflecting mirror to the focal position of the objective lens. CONSTITUTION:A lever 4 having a probe 1, a minute reflecting mirror 2 and a balance wt. 3 mounted thereto is held to a holder 6 by a bearing 5, and the holder 6 is fixed to the mirror cylinder 9 of an objective lens 8 while the mirror 2 is positioned in the vicinity of the focal position of the objective lens 8 by a clamp knob 7. A probe position adjusting knob 10 is operated to accurately match the mirror 2 with the focal position of the lens 8. When a measuring object is moved to X- and Y-direction by a specimen position adjusting device, the probe 1 contacted with the surface of the object displaces up and down correspondingly to the uneven shape of the surface of the object. Hereupon, the mirror 2 simultaneously displaces up and down in the same quantity. The converged laser beam 11 passed through the lens 8 is reflected by the mirror 2 and counted in digital quantity as the up-and-down movement of the probe 1, that is, the up-and-down movement of the mirror 2 by a laser interferometer and the uneven shape of the surface of the object is detected.
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