| 摘要 |
PURPOSE:To improve the efficiency in the production of chlorosilanes by crushing silicon in a nonoxidizing atmosphere, and passing gaseous chlorine through the particles to enhance the contact efficiency between the silicon particles and gaseous chlorine. CONSTITUTION:Metallic silicon is crushed to 1mum-2mum mean particle diameter in an inert gas or in vacuum. The particles are packed in a reaction tube, etc., in the nonoxidizing atmosphere, and heated to evaporate and remove water. Gaseous chlorine is then supplied at 140-300 deg.C, hence chlorine reacts with silicon, and the silicon particles are chlorinated. The formation of by-products is reduced by this method, and chlorosilanes (SinCl2n+2, where n>=2) can be produced with high efficiency.
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