发明名称
摘要 PURPOSE:To enable a control of contact pressure with high accuracy to be effected assuredly by constituting a position control circuit such that the contact pressure control is effected with taking into consideration, in addition to the amount of displacement due to contact of a movable member with a stationary member, the rate of change of such displacement amount. CONSTITUTION:A sampling hold circuit 2 receives and samples a signal Vi of the position of a movable member 2 to hold same, and a subtractor circuit 3 calculates the difference of the position signal Vi from the output of the sampling hold circuit 2. Integrator circuits 4, 5 integrate the output of the subtractor circuit 3 and a constant fixed voltage (-V), respectively. Another subtractor circuit 6 calculates the difference between the outputs Va, Vb of both integrator circuits 4, 5, and a voltage comparator circuit 7 effects a comparison of levels between the output of the subtractor circuit 6 and a reference voltage Vref for setting a predetermined contact pressure to generate an output representative of the result of the judgement of the actual contact pressure.
申请公布号 JPS63808(B2) 申请公布日期 1988.01.08
申请号 JP19780046530 申请日期 1978.04.21
申请人 HITACHI LTD 发明人 NOMURA KEIZO;YABUHARA YOJI
分类号 H01L21/30;G05D3/00;G05D3/12;G05D15/00;G05D15/01;H01L21/027;H01L21/67;H01L21/68 主分类号 H01L21/30
代理机构 代理人
主权项
地址