发明名称 |
Photoelectric conversion device and method for manufacturing photoelectric conversion device |
摘要 |
The inventive photoelectric conversion device includes a substrate, a lower electrode layer provided on the substrate, a CIGS compound semiconductor layer provided on the lower electrode layer as covering the lower electrode layer, and a transparent electrode layer provided on the compound semiconductor layer, wherein the compound semiconductor layer has a maximum Ga content variation of not less than 5% as measured in a layer thickness direction, and a maximum In content variation of not less than 6% as measured in the layer thickness direction. |
申请公布号 |
US9496433(B2) |
申请公布日期 |
2016.11.15 |
申请号 |
US201314436075 |
申请日期 |
2013.10.10 |
申请人 |
ROHM CO., LTD.;NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY |
发明人 |
Maekawa Takuji;Niki Shigeru;Ishizuka Shogo;Shibata Hajime |
分类号 |
H01L31/0272;H01L31/065;C23C14/34;H01L31/032;H01L31/10;H01L31/0224;H01L31/0392;H01L27/146;H01L31/18 |
主分类号 |
H01L31/0272 |
代理机构 |
Rabin & Berdo, P.C. |
代理人 |
Rabin & Berdo, P.C. |
主权项 |
1. A photoelectric conversion device comprising:
a substrate; a lower electrode layer provided on the substrate; a CIGS compound semiconductor layer provided on the lower electrode layer as covering the lower electrode layer; and a transparent electrode layer provided on the compound semiconductor layer; wherein the compound semiconductor layer has a Ga content having a maximum variation of not less than 5% as measured in a layer thickness direction, and has an In content having a maximum variation of not less than 6% as measured in the layer thickness direction, the Ga content and the In content varying continuously in the layer thickness direction. |
地址 |
Kyoto JP |