发明名称 Photoelectric conversion device and method for manufacturing photoelectric conversion device
摘要 The inventive photoelectric conversion device includes a substrate, a lower electrode layer provided on the substrate, a CIGS compound semiconductor layer provided on the lower electrode layer as covering the lower electrode layer, and a transparent electrode layer provided on the compound semiconductor layer, wherein the compound semiconductor layer has a maximum Ga content variation of not less than 5% as measured in a layer thickness direction, and a maximum In content variation of not less than 6% as measured in the layer thickness direction.
申请公布号 US9496433(B2) 申请公布日期 2016.11.15
申请号 US201314436075 申请日期 2013.10.10
申请人 ROHM CO., LTD.;NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY 发明人 Maekawa Takuji;Niki Shigeru;Ishizuka Shogo;Shibata Hajime
分类号 H01L31/0272;H01L31/065;C23C14/34;H01L31/032;H01L31/10;H01L31/0224;H01L31/0392;H01L27/146;H01L31/18 主分类号 H01L31/0272
代理机构 Rabin & Berdo, P.C. 代理人 Rabin & Berdo, P.C.
主权项 1. A photoelectric conversion device comprising: a substrate; a lower electrode layer provided on the substrate; a CIGS compound semiconductor layer provided on the lower electrode layer as covering the lower electrode layer; and a transparent electrode layer provided on the compound semiconductor layer; wherein the compound semiconductor layer has a Ga content having a maximum variation of not less than 5% as measured in a layer thickness direction, and has an In content having a maximum variation of not less than 6% as measured in the layer thickness direction, the Ga content and the In content varying continuously in the layer thickness direction.
地址 Kyoto JP