| 摘要 |
PURPOSE:To accurately analyze an object to be inspected that is easily oxidized by providing a sample surface cutting cutter in a vacuum sample chamber so as to be able to freely enter and leave a sample surface by an operation from outside and using an analyzing sample moving device as a cutting driving device for the sample surface. CONSTITUTION:When the surface layer of a sample S whose surface has been deteriorated is cut, moving tables 2 and 3 are driven so that a cutter 8 in a position apart from around a sample holder 1 is positioned above the specimen S by rotating a post 6 by operating bevel gears from outside. Then, the post 6 is lowered by operating a cam and a suitable cutting pressure is applied to the cutter 8 against the sample S by the resilient force of a leaf spring 7. In this condition, the holder 1 is moved in an X or Y direction by the moving tables 2 and 3 and a cut groove 9 is formed in the sample S. Then, a quantitative analysis is performed by an electron beam microanalyzer or the like. |
