| 摘要 |
PROBLEM TO BE SOLVED: To provide an ultrasonic probe which can improve the conversion efficiency and S/N of a reception signal in a plurality of organic piezoelectric elements while having excellent acoustic transmissivity with respect to an ultrasonic beam transmitted from a plurality of inorganic piezoelectric elements, correctly match the arrangement positions of the plurality of inorganic piezoelectric elements and the plurality of organic piezoelectric elements with each other, and maintain the characteristics of the organic piezoelectric elements at the high level even after device completion.SOLUTION: A backing material 1, an inorganic piezoelectric element layer, an acoustic matching layer, an organic layer and a conductive layer are sequentially laminated, then the positions of respective fragments of the plurality of inorganic piezoelectric elements 2, the first acoustic matching layer 3, a lower side organic layer 42 and a signal electrode layer 44 are aligned and sequentially laminated by performing dicing from the conductive layer to the inorganic piezoelectric element layer in the lamination direction at any pitch, and then an upper side organic layer 41 and a ground electrode layer 43 are overlapped and joined on the signal electrode layer 44. A plurality of organic piezoelectric elements 5 constituted by the signal electrode layer 44, the upper side organic layer 41 and the ground electrode layer 43 is formed as described above.SELECTED DRAWING: Figure 1 |
