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发明名称
HANDLER FOR COMPONENT
摘要
申请公布号
JPS6361967(A)
申请公布日期
1988.03.18
申请号
JP19860207145
申请日期
1986.09.03
申请人
HITACHI ELECTRONICS ENG CO LTD
发明人
HIROKAWA HIDEO;TAIRA MICHIO
分类号
H01L21/66;B65G47/52;B65G59/06;B65G61/00;G01R31/18
主分类号
H01L21/66
代理机构
代理人
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