MANUFACTURE OF GAMMA IRON OXIDE THIN FILM

摘要

PURPOSE:To easily manufacture a vertical magnetic film of gamma-Fe2O3 by chemically depositing organic iron compound vapor as a material on a substrate coated with a spinel ferrite film oriented in a plane (111). CONSTITUTION:Si is used as a substrate 8, a mixture powder of iron (III) acetylacetonate and cobalt (III) acetylacetonate is used as the organic metal compound 4 of a bubbler 2, and the bubbler 2 is heated to introduce the vapor of the compound 4 into a reaction tube 1 together with oxygen gas 6. A current flows to a high frequency coil 9 to generate a plasma, and a spinel oxide film of a cobalt and an iron oriented in (111) plane is formed on the substrate 8. Then, only iron (III) acetylacetonate is used as the compound 4, and similarly deposited by the plasma to form a continuous film of gamma-Fe2O3.