| 摘要 |
PROBLEM TO BE SOLVED: To provide an electric current detection device for charged particle beams capable of enhancing the accuracy in measuring the intensity of charged particle beams by means of electric current.SOLUTION: An electric current detection device for charged particle beams of one embodiment of the present invention includes: a high-temperature superconductor (HTS) electric current sensor cylinder 102; a magnetic sensor 104; and a magnetic shield member 106 of high-permeability material. The HTS electric current sensor cylinder includes: a cylinder member 102 C for allowing charged particle beams to pass through inside thereof in the axis direction; and a high-temperature superconductor flim 102H disposed in the inner surface, external surface, and edge surface thereof and having a superconductive critical temperature Tc which is higher than a liquid helium temperature. The magnetic sensor is disposed at a magnetic flux detection position where a measurement target magnetic flux is generated. Then, the magnetic shield member 106 is arranged to come in contact with the surface of the high-temperature superconductive film of the HTS electric current sensor cylinder heading for the magnetic flux detection position, and is fixed to the HTS electric current sensor cylinder so as to enclose the magnetic sensor involving the surface. |
