| 摘要 |
PURPOSE:To reduce the regeneration time, by increasing temperature of a panel detaching it from a cylinder and emitting gas from the panel to be exhausted by a turbo molecular pump or the like when regeneration is performed. CONSTITUTION:A shape memory alloy 5 of spring shape is used for connecting a cylinder 3 with a panel 4, and its temperature is increased detaching the panel 4 from a cylinder 2 by a change of temperature when regeneration is performed. In this way, a molecule of gas, condensed to the panel 4, is detached from it, but this molecule of gas is exhausted by a vacuum through a turbo molecular pump 8. Accordingly, reduction of the regeneration time is promoted because regeneration can be processed without stopping a helium refrigerator.
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