| 摘要 |
PURPOSE:To prevent plural thermally deformable materials from being distorted and deformed by heat at the time of forming thin films by providing means for preventing distortion and deformation to the said plural members to be subjected to thermal deformation in a high vacuum region. CONSTITUTION:A material 4 to be deposited by evaporation in a crucible 5 is bombarded and heated by the electrons emitted from a filament 7 for electron bombardment to form vapor in a vacuum vessel 1. The vapor is ionized to form ion clusters 21 which are deposited on a substrate 23. Worked neck parts 25 are provided to the top ends of supporting bars 9, 13, 15, 18 of respective heat shielding plates 8, 14, etc., and are inserted into loose holes 26 provided to the plates 8, 14, etc., and the snap rings 27 are provided. the loose holes 26 of the plates 8, 14, etc., move with respect to the neck parts 25 and absorb thermal expansion even if the plates 8, 14 gradually heated by the heat radiated from the crucible 5 and expand thermally. The distortion and deformation of the plates 8, 14, etc., are thereby prevented.
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