| 摘要 |
PURPOSE:To perform the trimming of high accuracy at high speed by making the travelling speed of a laser light by a beam positioner variable in proportion to the difference in the levels of the measuring voltage of the body to be worked and a target voltage. CONSTITUTION:The current measuring values of the resistance, voltage, etc., of a trimming sample are inputted in the reversed input 2 of a differential amplifier 1 and a trimming target value is inputted into a non-reversed input 3. A speed command signal 5 and the output of the differential amplifier 1 are inputted in the modulator 4 composed by an A/D convertor 41 and divider 42. The speed command signal 5 modulated by the modulator 4 is inputted to the driver 6 composed by a position control circuit 61 and driving circuit 62 and the positional signal 7 from an encoder is also inputted. The travelling speed of the laser light by the beam positioner becomes the speed in proportion to the difference in the measuring value of the sample and the target value. Consequently its speed is automatically reduced according to the current measuring values of the resistance, voltage, etc., of the sample approaching the target value. |
