发明名称 DOUBLE SIDE POLISHING DEVICE
摘要 PURPOSE:To aim at a lowering of work defective percentage and an improvement in surface plate life, by setting the material of upper and lower surface plates in a device for polishing both sides of a work down to the alloyed steel that added more than one type of other elements to carbon steel. CONSTITUTION:Both upper and lower surface plates 11 and 12, holding a work 16 with a carrier 15 and pinching this work from top and bottom for polishing it free of rotation, are made of the alloyed steel that added more than one type of elements other than C to carbon steel consisting of iron and C. As for elements other than C, one type or plural types of, for example, Si, Mn, S, P, Cr, Mo, Co, W and V are added at the specified rate. In consequence, high speed polishing comes possible and, what is more, improvements in work yield and surface plate life are well promotable.
申请公布号 JPS63134153(A) 申请公布日期 1988.06.06
申请号 JP19860280368 申请日期 1986.11.25
申请人 SPEEDFAM CO LTD 发明人 NAGAHASHI ISAO
分类号 B24B7/17 主分类号 B24B7/17
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