| 摘要 |
PURPOSE:To obtain a magnetic film, whose vertical magnetic anisotropic performance is large at low temperature of 150 deg.C or less, with excellent reproducibility, by introducing metal chelate, which contains Pb and Fe, or organic metal, and oxygen into a reaction chamber in a state of reduced pressure and next generating plasma and precipitating lead ferrite on a substrate. CONSTITUTION:Vapors of metal chelate containing iron and lead, or organic metal, and oxygen as a reactive gas are introduced into a reaction container 11 in a state of reduced pressure 10<-1>Torr to 10<-4>Torr. These gases are decomposed in plasma generated by magnetron discharge and electron cyclotron resonance, and lead ferrite is precipitated on a substrate 15. For example, Pb(C5H7 O)2 and Fe(C5H7O)3 are put in bubblers 16 and 17, respectively, which are heated at 150 deg.C. Ar gases 18 are made to flow to the respective bubblers, and these vapors are introduced on the polyimide substrate 15 in a reaction chamber 11 which is made to be in reduced pressure by a rotary pump 20. Successively, oxygen 19 is also made to flow on the polyimide substrate 15, and its reaction is performed in the plasma generated by high frequency power.
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