| 摘要 |
PURPOSE:To observe and inspect defects in a mask with good accuracy by a method wherein a convergent light is irradiated on part of the surface of a sample at a prescribed angle and the sample surface irradiated with the convergent light is observed from an angle different from the angle of irradiation of the convergent light. CONSTITUTION:The inspection of defects in a sample 1 is conducted by a method wherein a convergent light 4A is irradiated on part of the surface of the sample 1 at a prescribed angle and the surface, which is irradiated with the convergent light 4A, of the sample 1 is observed by an observer 5 at an angle different from the angle of irradiation of this convergent light 4A. By performing this observation about within the prescribed region of the surface of the sample 1, a fine defect, that is, a damaged part and the existence of a foreign substance are clarified and the defect can be observed and inspected with good accuracy, because the convergent light 4A is locally irradiated on the surface of the sample 1 and the unnecessary reflection and scattering on the surface of the sample 1 can be reduced. Moreover, by providing a defect inspecting unit with a supporting stand 2 and a moving unit 3, the prescribed region or whole region of the surface of the sample 1 having a comparatively large area can be easily inspected with good accuracy. |
