| 摘要 |
PURPOSE:To miniaturize a system as a whole, by heating the pure water taken in from the outside to temp. slightly higher than the use temp. in an apparatus main body to hold the same to said temp. CONSTITUTION:A degassing part 22 capable of degassing the dissolved gas in the pure water taken in from a pure water apparatus 20 by heating said pure water to temp. slightly higher than the use temp. in an apparatus main body 21 to hold the same to said temp. is arranged in the apparatus main body 21. The pure water made by the apparatus 20 is taken in the preheating tank 6 in the degassing part 22 through a pump 2. Herein, when the temp. of the constant temp. water in a thermostatic tank 13 is set to 37 deg.C, the pure water is heated to temp. of 44-47 deg.C slightly higher than the temp. of the constant temp. water in the degassing part 22. Next, the degassed water in the tank 6 is not only fed out to be supplied into the tank 13 through a pump 9 and a pipe 10 but also emitted into a reaction cell 12 through a pump 8 and a nozzle 11. Therefore, air bubbles are not generated in the tank 13. Further, the enhancement of degassing efficiency is achieved in the tank 6 by the stirring action of a stirrer 17. By this method, the miniaturization of the system can be achieved as a whole.
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