GAS DISCHARGE DERIVED ANNULAR PLASMA PINCH X-RAY SOURCE

摘要

TITLE GAS DISCHARGE DERIVED ANNULAR PLASMA PINCH X-RAY SOURCE INVENTORS RAJENDRA P. GUPTA MLADEN M. KEKEZ JOHN H. LAU GARY D. LOUGHEED This invention describes a pulsed plasma pinch x-ray source. In the device the initial plasma annulus is derived from an electrical gas discharge in a chamber having constricted openings arranged on a circle. This low mass plasma annulus is imploded and pinched by passing high current axially through said annulus. The hot and dense pinched plasma copiously emits x-rays and has the capability of being fired at high repetition rates. The device is simple for commercial applications, such as x-ray lithography.